Electrical and thermal conduction in ultra-thin freestanding atomic layer deposited W nanobridges
Abstract
Electro/thermal conduction is reduced substantially in ultra-thin ALD W films. Evidence of phonon conduction appears in fabricated W structures.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jan 01, 2015
- Source ID
- 10.1039/c5nr04885k
Entities
People
- George D. Skidmore
- Jonas C Gertsch
- Nathan T. Eigenfeld
- Steven M. George
- Victor M. Bright
Organizations
- Army Research Office
- Defense Advanced Research Projects Agency
- University of Colorado Boulder
- Yusuf Hamied Department of Chemistry