Electrical and thermal conduction in ultra-thin freestanding atomic layer deposited W nanobridges

Abstract

Electro/thermal conduction is reduced substantially in ultra-thin ALD W films. Evidence of phonon conduction appears in fabricated W structures.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 01, 2015
Source ID
10.1039/c5nr04885k

Entities

People

  • George D. Skidmore
  • Jonas C Gertsch
  • Nathan T. Eigenfeld
  • Steven M. George
  • Victor M. Bright

Organizations

  • Army Research Office
  • Defense Advanced Research Projects Agency
  • University of Colorado Boulder
  • Yusuf Hamied Department of Chemistry

Tags

Readers

  • Thermal Physics or Thermal Science.
  • Thin Film Deposition Science.