A comprehensive study on the structural evolution of HfO2thin films doped with various dopants

Abstract

Quantitative phase analysis is first performed on doped Hafnia films to elucidate the structural origin of unexpected ferroelectricity.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 01, 2017
Source ID
10.1039/c7tc01200d

Entities

People

  • C. Richter
  • Chong Zhou
  • Chris M Fancher
  • E. D. Grimley
  • J. M. Lebeau
  • Jacob L. Jones
  • Min Hyuk Park
  • T. Schenk
  • Thomas Mikolajick
  • Uwe Schroeder

Organizations

  • Army Research Office
  • Dynamo Dresden
  • German Research Foundation
  • National Science Foundation
  • North Carolina State University
  • Oak Ridge National Laboratory
  • Technische Universität Dresden
  • United States Army

Tags

Fields of Study

  • Physics