Effect of relative humidity and pre-annealing temperature on spin-coated zinc tin oxide films made via the metal–organic decomposition route

Abstract

Solution-processed zinc tin oxide thin-film transistor using metal–organic decomposition achieves wide process window in terms of ambient humidity during deposition.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 01, 2017
Source ID
10.1039/c7tc02343j

Entities

People

  • An Liao
  • Rebecca L Peterson
  • Youngbae Son

Organizations

  • Defense Advanced Research Projects Agency
  • United States Army
  • University of Michigan

Tags

Fields of Study

  • Materials science

Readers

  • Mathematics or Statistics
  • Thin Film Deposition Science.