Fabrication of multi-material 3D structures by the integration of direct laser writing and MEMS stencil patterning
Abstract
MEMS stencil patterning coupled with direct laser writing is used to fabricate 3D microstructures with nanoscale metallic elements.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jan 01, 2019
- Source ID
- 10.1039/c8nr09174a
Entities
People
- Alice E. White
- D. J. Bishop
- Jeremy B Reeves
- Lawrence Barrett
- Rachael K. Jayne
Organizations
- Boston University
- Defense Advanced Research Projects Agency
- Division of Civil, Mechanical & Manufacturing Innovation
- National Science Foundation
- United States Army