Fabrication of multi-material 3D structures by the integration of direct laser writing and MEMS stencil patterning

Abstract

MEMS stencil patterning coupled with direct laser writing is used to fabricate 3D microstructures with nanoscale metallic elements.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 01, 2019
Source ID
10.1039/c8nr09174a

Entities

People

  • Alice E. White
  • D. J. Bishop
  • Jeremy B Reeves
  • Lawrence Barrett
  • Rachael K. Jayne

Organizations

  • Boston University
  • Defense Advanced Research Projects Agency
  • Division of Civil, Mechanical & Manufacturing Innovation
  • National Science Foundation
  • United States Army

Tags

Readers

  • Integrated Circuit Design and Technology.
  • Manufacturing Engineering.

Technology Areas

  • Directed Energy