Avoiding water reservoir effects in ALD of functional complex alkali oxides by using O3 as the oxygen source

Abstract

A new ozone-based route for excellent control of complex alkali oxides by ALD.

Document Details

• Document Type: Pub Defense Publication
• Publication Date: Jan 01, 2022
• Source ID: 10.1039/d1dt03960a

Entities

People

• Eric G. Martin
• Henrik H Sønsteby
• Justin R. Bickford
• Linn M. Rykkje
• Ola Nilsen
• Robert C. Hoffman
• Veronica A.-l. K. Killi

Organizations

• United States Army Research Laboratory
• University of Oslo