Large-size free-standing single-crystal β-Ga2O3 membranes fabricated by hydrogen implantation and lift-off
Abstract
This paper reports the first successful demonstration of large-size free-standing single-crystal β-Ga2O3 NMs fabricated by the hydrogen implantation and lift-off process directly from MOCVD grown β-Ga2O3 epifilms on native substrates.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jan 01, 2021
- Source ID
- 10.1039/d1tc00682g
Entities
People
- A F M Anhar Uddin Bhuiyan
- Hongping Zhao
- Jung-Hun Seo
- Lingyu Meng
- Quanxi Jia
- Samyak Dhole
- Yixiong Zheng
- Zixuan Feng
Organizations
- Air Force Office of Scientific Research
- National Science Foundation
- Ohio State University
- State University of New York
- United States Army
- University at Buffalo