A low-temperature route for producing epitaxial perovskite superlattice structures on (001)-oriented SrTiO3/Si substrates
Abstract
We report on the formation of epitaxial perovskite oxide superlattice structures by atomic layer deposition (ALD), which are integrated monolithically on Si wafers using a template layer of SrTiO3 deposited by hybrid molecular beam epitaxy.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jan 01, 2021
- Source ID
- 10.1039/d1tc01988k
Entities
People
- Aleksandr V. Plokhikh
- Alexander L. Vasiliev
- Igor A. Karateev
- Jason Lapano
- Jonathan E Spanier
- Matthias Falmbigl
- Roman Engel-herbert
- И. С. Головина
Organizations
- Division of Materials Research
- Drexel University
- Moscow Institute of Physics and Technology
- National Research Centre Kurchatov Institute
- Office of Naval Research
- Pennsylvania State University
- United States Army Research Laboratory