Characterization of ferroelectric material properties of multifunctional lead zirconate titanate for energy harvesting sensor nodes
Abstract
We propose a microsystem integration technique that is ideal for low-cost fabrication of vibration energy harvesting sensor nodes. Our approach exploits diverse uses of sol-gel deposited lead zirconate titanate, effectively combining fabrication of several microsystem components into a single process and significantly reducing manufacturing cost and time. Here, we measure and characterize thin film parameters—such as the piezoelectric coefficient e31 (−4.0 C/m2), the dielectric constant εr-eff (219 at 3.3 V), and the total switching polarization (2Pr;52 μC/cm2)—in order to verify this material’s potential for energy harvesting, energy storage, and nonvolatile memory applications simultaneously on the same device.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jan 01, 2011
- Source ID
- 10.1063/1.3524271
Entities
People
- Bozidar Marinkovic
- Hur Koser
- Tolga Kaya
Organizations
- Central Michigan University
- National Science Foundation
- Office of Naval Research
- Yale University