Resolution of the transfer direction of field-evaporated gold atoms for nanofabrication and microelectromechanical system applications

Abstract

Field evaporation is an important phenomenon utilized in probe-based nanofabrication as well as a potential factor in contact reliability of microelectromechanical system (MEMS) switches. Previous studies have left the issue of transfer direction unresolved on account of uncertainties associated with sample geometry effects. We report a resolution of the transfer direction employing techniques to study field-induced transfer in both MEMS switches and atomic force microscope configurations. The results suggest the formation of positive gold ions that are transferred in the direction of the electric field, and confirm field evaporation as a material transport mechanism in MEMS switches.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 24, 2011
Source ID
10.1063/1.3545846

Entities

People

  • A. I . Kingon
  • D. J. Lichtenwalner
  • J. Krim
  • S. Hoffmann
  • Zhengyu Yang

Organizations

  • Air Force Office of Scientific Research
  • Brown University
  • North Carolina State University
  • Office of Naval Research

Tags

Readers

  • Integrated Circuit Design and Technology.
  • Nanoscale Plasmonic Nanotechnology
  • Theoretical Analysis.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems