Effects of Mg on the electrical characteristics and thermal stability of MgxZn1−xO thin film transistors

Abstract

The effects of the Mg composition (x=0, 0.06, and 0.10) on the electrical characteristics and thermal stability of MgxZn1−xO thin film transistors (TFTs) are investigated. The Mg0.06Zn0.94O TFT shows the smallest subthreshold slope and highest field effect mobility. The O1s spectra of x-ray photoelectron spectroscopy measurements indicate that the oxygen vacancies are reduced in Mg0.06Zn0.94O relative to a pure ZnO channel device. Mg0.06Zn0.94O TFTs also show higher thermal stability compared to the pure ZnO TFTs, which is mainly attributed to the suppression of oxygen vacancies in the channel.

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 21, 2011
Source ID
10.1063/1.3567533

Entities

People

  • Chieh-jen Ku
  • Chien-lan Hsueh
  • Eric Garfunkel
  • Pavel I. Reyes
  • Yi Xu
  • Yicheng Lu
  • Ziqing Duan

Organizations

  • Air Force Office of Scientific Research
  • National Science Foundation
  • Rutgers University

Tags

Fields of Study

  • Materials science

Readers

  • Integrated Circuit Design and Technology.
  • Spectroscopy.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics