Size tunable visible and near-infrared photoluminescence from vertically etched silicon quantum dots
Abstract
Corrugated etching techniques were used to fabricate size-tunable silicon quantum dots that luminesce under photoexcitation, tunable over the visible and near infrared. By using the fidelity of lithographic patterning and strain limited, self-terminating oxidation, uniform arrays of pillar containing stacked quantum dots as small as 2 nm were patterned. Furthermore, an array of pillars, with multiple similar sized quantum dots on each pillar, was fabricated and tested. The photoluminescence displayed a multiple, closely peaked emission spectra corresponding to quantum dots with a narrow size distribution. Similar structures can provide quantum confinement effects for future nanophotonic and nanoelectronic devices.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Apr 11, 2011
- Source ID
- 10.1063/1.3580768
Entities
People
- Andrew P. Homyk
- Axel Scherer
- Carrie E. Hofmann
- Claudia Shin
- Harry Atwater
- M. David Henry
- Sameer S. Walavalkar
Organizations
- California Institute of Technology
- Defense Advanced Research Projects Agency