In-situ stoichiometry determination using x-ray fluorescence generated by reflection-high-energy-electron-diffraction

Abstract

A major challenge in the stoichiometric growth of complex oxide compounds is the control of the relative compositions of the constituent materials. A potential avenue for compositional analysis during growth is the use of x-ray fluorescence generated during reflection high energy electron diffraction measurements. Using this technique, relative compositions of Y and Mn in molecular beam epitaxy grown YMnO3 samples were studied. Comparing the results with Rutherford back scattering spectroscopy suggests that the technique has the potential for real-time analysis of elemental fluxes and stoichiometry control during sample growth.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2011
Source ID
10.1063/1.3592219

Entities

People

  • Cameron Keenan
  • David Lederman
  • Sandeep Chandril
  • T. H. Myers

Organizations

  • Office of Naval Research
  • Texas State University
  • West Virginia University

Tags

Fields of Study

  • Materials science

Readers

  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics