Self-heating in piezoresistive cantilevers
Abstract
We report experiments and models of self-heating in piezoresistive microcantilevers that show how cantilever measurement resolution depends on the thermal properties of the surrounding fluid. The predicted cantilever temperature rise from a finite difference model is compared with detailed temperature measurements on fabricated devices. Increasing the fluid thermal conductivity allows for lower temperature operation for a given power dissipation, leading to lower force and displacement noise. The force noise in air is 76% greater than in water for the same increase in piezoresistor temperature.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- May 30, 2011
- Source ID
- 10.1063/1.3595485
Entities
People
- Beth L. Pruitt
- Elise A. Corbin
- Joseph C. Doll
- William P King
Organizations
- Defense Advanced Research Projects Agency
- National Institutes of Health
- National Science Foundation
- Stanford University
- University of Illinois Urbana–Champaign