Low-loss asymmetric strip-loaded slot waveguides in silicon-on-insulator
Abstract
We report on low-loss asymmetric strip-loaded slot waveguides in silicon-on-insulator fabricated with 248 nm photolithography. Waveguide losses were 2 dB/cm or less at wavelengths near 1550 nm. A 40 nm strip-loading allows low-resistance electrical contact to be made to the two slot arms. The asymmetric design suppresses the TE1 mode while increasing the wavelength range for which the TE0 mode guides. This type of waveguide is suitable for building low insertion-loss, high-bandwidth, low drive-voltage modulators, when coated with an electro-optic polymer cladding.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jun 06, 2011
- Source ID
- 10.1063/1.3597798
Entities
People
- Alexander Spott
- Andrew Pomerene
- Bryan Boyko
- Craig L Hill
- Michael E. Hochberg
- Ran Ding
- Richard Bojko
- Tom Baehr-jones
- Wesley Reinhardt
- Woo-joong Kim
Organizations
- Air Force Office of Scientific Research
- BAE Systems
- Seattle University
- University of Washington