Influence of bending strains on radio frequency characteristics of flexible microwave switches using single-crystal silicon nanomembranes on plastic substrate

Abstract

This letter presents radio frequency (RF) characterization of flexible microwave switches using single-crystal silicon nanomembranes (SiNMs) on plastic substrate under various uniaxial mechanical tensile bending strains. The flexible switches shows significant/negligible performance enhancement on strains under on/off states from dc to 10 GHz. Furthermore, an RF/microwave strain equivalent circuit model is developed and reveals the most influential factors, and un-proportional device parameters change with bending strains. The study demonstrates that flexible microwave single-crystal SiNM switches, as a simple circuit example towards the goal of flexible monolithic microwave integrated circuits, can be properly operated and modeled under mechanical bending conditions.

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 10, 2011
Source ID
10.1063/1.3651276

Entities

People

  • George K. Celler
  • Guoxuan Qin
  • Hao-chih Yuan
  • Jianguo Ma
  • Zhenqiang Ma

Organizations

  • Air Force Office of Scientific Research
  • National Natural Science Foundation of China
  • Tianjin University
  • University of Wisconsin–Madison

Tags

Fields of Study

  • Materials science

Readers

  • Integrated Circuit Design and Technology.
  • Mechanical Engineering/Mechanics of Materials.
  • Microwave Engineering.