Two-step controllable electrochemical etching of tungsten scanning probe microscopy tips

Abstract

Dynamic electrochemical etching technique is optimized to produce tungsten tips with controllable shape and radius of curvature of less than 10 nm. Nascent features such as “dynamic electrochemical etching” and reverse biasing after “drop-off” are utilized, and “two-step dynamic electrochemical etching” is introduced to produce extremely sharp tips with controllable aspect ratio. Electronic current shut-off time for conventional dc “drop-off” technique is reduced to ∼36 ns using high speed analog electronics. Undesirable variability in tip shape, which is innate to static dc electrochemical etching, is mitigated with novel “dynamic electrochemical etching.” Overall, we present a facile and robust approach, whereby using a novel etchant level adjustment mechanism, 30° variability in cone angle and 1.5 mm controllability in cone length were achieved, while routinely producing ultra-sharp probes.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2012
Source ID
10.1063/1.4730045

Entities

People

  • Boon S Ooi
  • Hisham Al-falih
  • Tien Khee Ng
  • Yaping Zhang
  • Yasser Khan

Organizations

  • Defense Advanced Research Projects Agency
  • King Abdullah University of Science and Technology

Tags

Fields of Study

  • Materials science

Readers

  • Adaptive Control and Estimation with Uncertainty in Dynamic Systems.
  • Nanofabrication and Microfabrication.
  • Nanoscale Plasmonic Nanotechnology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems