Fixed charge in high-k/GaN metal-oxide-semiconductor capacitor structures

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 03, 2012
Source ID
10.1063/1.4751466

Entities

People

  • Brian M. McSkimming
  • Junwoo Son
  • Susanne Stemmer
  • Varistha Chobpattana

Organizations

  • Office of Naval Research

Tags

Technology Areas

  • Microelectronics