Ion implantation induced modification of optical properties in single-crystal diamond studied by coherent acoustic phonon spectroscopy
Abstract
Single-crystal CVD diamond specimens were implanted with 1-MeV He+ ions at fluences ranging from 1014 to 1016 cm−2 and analyzed using coherent acoustic phonon spectroscopy. The coherent acoustic phonon response varies greatly with implantation fluence and provides depth-dependent information about the implantation defect-induced modification of diamond's optical characteristics. The results indicate an increase in the real and imaginary refractive index, as well as a sign reversal of the photoelastic coefficients at higher levels of implantation damage. These studies provide insight into the application of ion implantation to the fabrication of diamond-based photonic devices.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Oct 29, 2012
- Source ID
- 10.1063/1.4765647
Entities
People
- Andrew Steigerwald
- Anthony Hmelo
- Hiroaki Takahashi
- Justin Gregory
- Norman Tolk
Organizations
- Army Research Office
- Japan Advanced Institute of Science and Technology
- National Science Foundation
- Vanderbilt University