In situ atomic layer deposition half cycle study of Al2O3 growth on AlGaN

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 19, 2012
Source ID
10.1063/1.4767520

Entities

People

  • Barry Brennan
  • Hong Dong
  • Jiyoung Kim
  • Robert M Wallace
  • Xiaoye Qin

Organizations

  • Air Force Office of Scientific Research