Electron attachment to fluorocarbon radicals

Abstract

Thermal electron attachment rate constants for a series of small fluorocarbon radicals (CF2, C2F3, 1-C3F7, 2-C3F7, C3F5, CF3O) were measured from 300 to 600 K using the variable electron and neutral density attachment mass spectrometry method. With the exception of CF2, for which no attachment was observed, all species exclusively underwent dissociative attachment to yield F−. The magnitude and temperature dependences of the rate constants varied significantly between species; however, attachment was in all cases inefficient, never exceeding 2% of the calculated collisional value. The data are interpreted and extrapolated to conditions inaccessible to the experiment using a kinetic modeling approach to the electron attachment process.

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 07, 2012
Source ID
10.1063/1.4768466

Entities

People

  • Albert A Viggiano
  • Nicholas S Shuman
  • Thomas M Miller

Organizations

  • Air Force Office of Scientific Research
  • Air Force Research Laboratory

Tags

Readers

  • Canadian European Scientific Immigration and Epilepsy Clearance Studies
  • Mathematics or Statistics
  • Molecular Photonics/Laser Physics

Technology Areas

  • Microelectronics