Electric field-tunable BaxSr1−xTiO3 films with high figures of merit grown by molecular beam epitaxy

Abstract

We report on the dielectric properties of BaxSr1−xTiO3 (BST) films grown by molecular beam epitaxy on epitaxial Pt bottom electrodes. Paraelectric films (x ≲ 0.5) exhibit dielectric losses that are similar to those of BST single crystals and ceramics. Films with device quality factors greater than 1000 and electric field tunabilities exceeding 1:5 are demonstrated. The results provide evidence for the importance of stoichiometry control and the use of a non-energetic deposition technique for achieving high figures of merit of tunable devices with BST thin films.

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 17, 2012
Source ID
10.1063/1.4773034

Entities

People

  • Adam J. Hauser
  • Adam P. Kajdos
  • Evgeny Mikheev
  • Susanne Stemmer

Organizations

  • Office of Naval Research

Tags

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology