Quantitative scanning thermal microscopy of ErAs/GaAs superlattice structures grown by molecular beam epitaxy

Abstract

A proximal probe-based quantitative measurement of thermal conductivity with ∼100–150 nm lateral and vertical spatial resolution has been implemented. Measurements on an ErAs/GaAs superlattice structure grown by molecular beam epitaxy with 3% volumetric ErAs content yielded thermal conductivity at room temperature of 9 ± 2 W/m K, approximately five times lower than that for GaAs. Numerical modeling of phonon scattering by ErAs nanoparticles yielded thermal conductivities in reasonable agreement with those measured experimentally and provides insight into the potential influence of nanoparticle shape on phonon scattering. Measurements of wedge-shaped samples created by focused ion beam milling provide direct confirmation of depth resolution achieved.

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 11, 2013
Source ID
10.1063/1.4792757

Entities

People

  • A. M. Crook
  • E. T. Yu
  • H. P. Nair
  • K. W. Park
  • Seth R. Bank

Organizations

  • Office of Naval Research
  • University of Texas at Austin

Tags

Fields of Study

  • Materials science

Readers

  • Electromagnetic Wave Scattering and Antenna Radiation Engineering
  • Semiconductor Device Technology

Technology Areas

  • Biotechnology