Laser direct writing of silicon field effect transistor sensors

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 04, 2013
Source ID
10.1063/1.4794147

Entities

People

  • Chookiat Tansarawiput
  • James I. Mitchell
  • Minghao Qi
  • Woongsik Nam
  • Xianfan Xu

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation

Tags

Technology Areas

  • Directed Energy