Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Apr 29, 2013
- Source ID
- 10.1063/1.4801979
Entities
People
- Alexander C. Kozen
- C. J. Lobb
- Gary W. Rubloff
- Kevin D Osborn
- Marshall A Schroeder
Organizations
- Army Research Office