A phononic bandgap shield for high-Q membrane microresonators
Abstract
A phononic crystal can control the acoustic coupling between a resonator and its support structure. We micromachine a phononic bandgap shield for high Q silicon nitride membranes and study the driven displacement spectra of the membranes and their support structures. We find that inside the observed bandgaps, the density and amplitude of non-membrane modes are greatly suppressed, and membrane modes are shielded from an external mechanical drive by up to 30 dB.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jan 13, 2014
- Source ID
- 10.1063/1.4862031
Entities
People
- Cindy A. Regal
- K. Cicak
- N. S. Kampel
- P.-l. Yu
- R. W. Simmonds
- T. P. Purdy
- Y. Tsaturyan
Organizations
- Defense Advanced Research Projects Agency
- National Institute of Standards and Technology
- University of Colorado