High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping
Abstract
We demonstrate high quality factor thin-film nanocrystalline diamond micromechanical resonators with quality factors limited by thermoelastic damping. Cantilevers, single-anchored and double-anchored double-ended tuning forks, were fabricated from 2.5 μm thick in-situ boron doped nanocrystalline diamond films deposited using hot filament chemical vapor deposition. Thermal conductivity measured by time-domain thermoreflectance resulted in 24 ± 3 W m−1 K−1 for heat transport through the thickness of the diamond film. The resonant frequencies of the fabricated resonators were 46 kHz–8 MHz and showed a maximum measured Q ≈ 86 000 at fn = 46.849 kHz. The measured Q-factors are shown to be in good agreement with the limit imposed by thermoelastic dissipation calculated using the measured thermal conductivity. The mechanical properties extracted from resonant frequency measurements indicate a Young's elastic modulus of ≈788 GPa, close to that of microcrystalline diamond.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Apr 14, 2014
- Source ID
- 10.1063/1.4871803
Entities
People
- David A. Horsley
- David G. Cahill
- Hadi Najar
- Hsueh-an Yang
- Liwei Lin
- Mei-lin Chan
Organizations
- Defense Advanced Research Projects Agency
- University of California
- University of Illinois Urbana–Champaign