Modulation of over 1014 cm−2 electrons in SrTiO3/GdTiO3 heterostructures

Abstract

We demonstrate charge modulation of over 1014 cm−2 electrons in a two-dimensional electron gas formed in SrTiO3/GdTiO3 inverted heterostructure field-effect transistors. Increased charge modulation was achieved by reducing the effect of interfacial region capacitances through thick SrTiO3 cap layers. Transport and device characteristics of the heterostructure field-effect transistors were found to match a long channel field effect transistor model. SrTiO3 impurity doped metal–semiconductor field effect transistors were also demonstrated with excellent pinch-off and current density exceeding prior reports. The work reported here provides a path towards oxide-based electronics with extreme charge modulation exceeding 1014 cm−2.

Document Details

Document Type
Pub Defense Publication
Publication Date
May 05, 2014
Source ID
10.1063/1.4875796

Entities

People

  • C. Polchinski
  • Clayton Jackson
  • M. Boucherit
  • M. L. C. Buffon
  • Omor Shoron
  • S. Stemmer
  • Sreejith Kochupurackal Rajan
  • T. A. Cain

Organizations

  • Office of Naval Research
  • Ohio State University
  • University of California

Tags

Fields of Study

  • Materials science
  • Physics

Readers

  • Electronics Engineering
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene