Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks
Abstract
A scalable approach for integrated photonic networks in single-crystal diamond using triangular etching of bulk samples is presented. We describe designs of high quality factor (Q = 2.51 × 106) photonic crystal cavities with low mode volume (Vm = 1.062 × (λ/n)3), which are connected via waveguides supported by suspension structures with predicted transmission loss of only 0.05 dB. We demonstrate the fabrication of these structures using transferred single-crystal silicon hard masks and angular dry etching, yielding photonic crystal cavities in the visible spectrum with measured quality factors in excess of Q = 3 × 103.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Nov 24, 2014
- Source ID
- 10.1063/1.4902562
Entities
People
- A. Stein
- C. A. Ruggiero
- Dirk Englund
- E. H. Chen
- I. Bayn
- J. A. Goldstein
- J. Salzman
- Jiangbin Zheng
- Liying Li
- Mingwu Lu
- O. Gaathon
- R. Kalish
- Sara Mouradian
- T. Schröder
Organizations
- Air Force Office of Scientific Research
- Alexander von Humboldt Foundation
- Brookhaven National Laboratory
- Massachusetts Institute of Technology
- Technion – Israel Institute of Technology
- United States Department of Energy