Encapsulated high frequency (235 kHz), high-Q (100 k) disk resonator gyroscope with electrostatic parametric pump
Abstract
In this paper, we explore the effects of electrostatic parametric amplification on a high quality factor (Q > 100 000) encapsulated disk resonator gyroscope (DRG), fabricated in 〈100〉 silicon. The DRG was operated in the n = 2 degenerate wineglass mode at 235 kHz, and electrostatically tuned so that the frequency split between the two degenerate modes was less than 100 mHz. A parametric pump at twice the resonant frequency is applied to the sense axis of the DRG, resulting in a maximum scale factor of 156.6 μV/(°/s), an 8.8× improvement over the non-amplified performance. When operated with a parametric gain of 5.4, a minimum angle random walk of 0.034°/√h and bias instability of 1.15°/h are achieved, representing an improvement by a factor of 4.3× and 1.5×, respectively.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 15, 2014
- Source ID
- 10.1063/1.4904468
Entities
People
- C. H. Ahn
- David A. Horsley
- E. J. Ng
- S. Nitzan
- T. Kimbrell
- T. W. Kenny
- V. A. Hong
- Yaping Yang
Organizations
- Defense Advanced Research Projects Agency
- National Science Foundation
- Stanford University
- University of California