Simulation study of HEMT structures with HfO2 cap layer for mitigating inverse piezoelectric effect related device failures

Abstract

The Inverse Piezoelectric Effect (IPE) is thought to contribute to possible device failure of GaN High Electron Mobility Transistors (HEMTs). Here we focus on a simulation study to probe the possible mitigation of the IPE by reducing the internal electric fields and related elastic energy through the use of high-k materials. Inclusion of a HfO2 “cap layer” above the AlGaN barrier particularly with a partial mesa structure is shown to have potential advantages. Simulations reveal even greater reductions in the internal electric fields by using “field plates” in concert with high-k oxides.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 01, 2015
Source ID
10.1063/1.4905702

Entities

People

  • Aswini Pradhan
  • Deepthi Nagulapally
  • R. P. Joshi

Organizations

  • Army Research Office
  • Norfolk State University
  • Old Dominion University

Tags

Fields of Study

  • Materials science

Readers

  • Computational Fluid Dynamics (CFD)
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics