Characterization of the temperature dependence of the thermoreflectance coefficient for conductive thin films
Abstract
We describe a novel approach for calibration of the thermoreflectance coefficient, ideally suited for measurements in a vacuum thermostat, and present the high temperature thermoreflectance coefficients for several metals commonly encountered in electronic devices: gold, platinum, and aluminum. The effect of passivation on these metals is also examined, and we demonstrate the signal to noise ratio of a thermoreflectance measurement can be improved with informed selection of the dielectric layer thickness. Furthermore, the thermo-optic coefficients of the metals are extracted over a wide temperature range. The results presented here can be utilized in the optimization of experimental configurations for high temperature thermoreflectance imaging.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Feb 01, 2015
- Source ID
- 10.1063/1.4907354
Entities
People
- A. Shakouri
- J.-h. Bahk
- T. Favaloro
Organizations
- Defense Advanced Research Projects Agency
- Purdue University
- United States Department of Energy
- University of California