Characterization of the temperature dependence of the thermoreflectance coefficient for conductive thin films

Abstract

We describe a novel approach for calibration of the thermoreflectance coefficient, ideally suited for measurements in a vacuum thermostat, and present the high temperature thermoreflectance coefficients for several metals commonly encountered in electronic devices: gold, platinum, and aluminum. The effect of passivation on these metals is also examined, and we demonstrate the signal to noise ratio of a thermoreflectance measurement can be improved with informed selection of the dielectric layer thickness. Furthermore, the thermo-optic coefficients of the metals are extracted over a wide temperature range. The results presented here can be utilized in the optimization of experimental configurations for high temperature thermoreflectance imaging.

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 01, 2015
Source ID
10.1063/1.4907354

Entities

People

  • A. Shakouri
  • J.-h. Bahk
  • T. Favaloro

Organizations

  • Defense Advanced Research Projects Agency
  • Purdue University
  • United States Department of Energy
  • University of California

Tags

Fields of Study

  • Physics

Readers

  • Optical Physics and Photonics.
  • Thermal Physics or Thermal Science.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics