Recovery in dc and rf performance of off-state step-stressed AlGaN/GaN high electron mobility transistors with thermal annealing

Abstract

The recovery effects of thermal annealing on dc and rf performance of off-state step-stressed AlGaN/GaN high electron mobility transistors were investigated. After stress, reverse gate leakage current and sub-threshold swing increased and drain current on-off ratio decreased. However, these degradations were completely recovered after thermal annealing at 450 °C for 10 mins for devices stressed either once or twice. The trap densities, which were estimated by temperature-dependent drain-current sub-threshold swing measurements, increased after off-state step-stress and were reduced after subsequent thermal annealing. In addition, the small signal rf characteristics of stressed devices were completely recovered after thermal annealing.

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 13, 2015
Source ID
10.1063/1.4918530

Entities

People

  • Byung-jae Kim
  • Chen Dong
  • David J Smith
  • Fan Ren
  • Jihyun Kim
  • Kevin S. Jones
  • Liu Lu
  • M. R. Holzworth
  • Ming-lan Zhang
  • Shihyun Ahn
  • Stephen Pearton
  • Weidi Zhu
  • Ya-hsi Hwang

Organizations

  • Arizona State University
  • Hebei University of Technology
  • Korea University
  • National Science Foundation
  • United States Department of Defense
  • University of Florida

Tags

Readers

  • Mathematics or Statistics
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics