A 10-GHz film-thickness-mode cavity optomechanical resonator
Abstract
We report on the advance of chip-scale cavity optomechanical resonators to beyond 10 GHz by exploiting the fundamental acoustic thickness mode of an aluminum nitride micro-disk. By engineering the mechanical anchor to minimize the acoustic loss, a quality factor of 1830 and hence a frequency-quality factor product of 1.9 × 1013 Hz are achieved in ambient air at room temperature. Actuated by strong piezo-electric force, the micro-disk resonator shows an excellent electro-optomechanical transduction efficiency. Our detailed analysis of the electro-optomechanical coupling allows identification and full quantification of various acoustic modes spanning from super-high to X-band microwave frequencies measured in the thin film resonator.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Apr 20, 2015
- Source ID
- 10.1063/1.4919113
Entities
People
- Hong X Tang
- King Y. Fong
- Xu Han
Organizations
- Air Force Office of Scientific Research
- Army Research Office
- David and Lucile Packard Foundation
- Defense Advanced Research Projects Agency
- National Science Foundation
- Yale University