Thermal conductivity of ultrathin nano-crystalline diamond films determined by Raman thermography assisted by silicon nanowires

Abstract

The thermal transport in polycrystalline diamond films near its nucleation region is still not well understood. Here, a steady-state technique to determine the thermal transport within the nano-crystalline diamond present at their nucleation site has been demonstrated. Taking advantage of silicon nanowires as surface temperature nano-sensors, and using Raman Thermography, the in-plane and cross-plane components of the thermal conductivity of ultra-thin diamond layers and their thermal barrier to the Si substrate were determined. Both components of the thermal conductivity of the nano-crystalline diamond were found to be well below the values of polycrystalline bulk diamond, with a cross-plane thermal conductivity larger than the in-plane thermal conductivity. Also a depth dependence of the lateral thermal conductivity through the diamond layer was determined. The results impact the design and integration of diamond for thermal management of AlGaN/GaN high power transistors and also show the usefulness of the nanowires as accurate nano-thermometers.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2015
Source ID
10.1063/1.4922035

Entities

People

  • Béla Pécz
  • Erhard Kohn
  • Julian Anaya
  • Lajos Tóth
  • Martin Kuball
  • Mohammed Alomari
  • Stefano Rossi

Organizations

  • Hungarian Scientific Research Fund
  • Institute for Technical Physics and Materials Science
  • Office of Naval Research Global
  • Ulm University
  • University of Bristol

Tags

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology
  • Thermal Physics or Thermal Science.