Increased p-type conductivity through use of an indium surfactant in the growth of Mg-doped GaN

Abstract

We have examined the effect of an indium surfactant on the growth of p-type GaN by ammonia-based molecular beam epitaxy. p-type GaN was grown at temperatures ranging from 700 to 780 °C with and without an indium surfactant. The Mg concentration in all films in this study was 4.5–6 × 1019 cm−3 as measured by secondary ion mass spectroscopy. All p-type GaN films grown with an indium surfactant had higher p-type conductivities and higher hole concentrations than similar films grown without an indium surfactant. The lowest p-type GaN room temperature resistivity was 0.59 Ω-cm, and the highest room temperature carrier concentration was 1.6 × 1018 cm−3. Fits of the temperature-dependent carrier concentration data showed a one to two order of magnitude lower unintentional compensating defect concentration in samples grown with the indium surfactant. Samples grown at higher temperature had a lower active acceptor concentration. Improvements in band-edge luminescence were seen by cathodoluminescence for samples grown with the indium surfactant, confirming the trends seen in the Hall data.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2015
Source ID
10.1063/1.4922216

Entities

People

  • Erin C. H. Kyle
  • Erin C. Young
  • James S. Speck
  • Stephen W. Kaun

Organizations

  • Defense Threat Reduction Agency
  • National Science Foundation
  • Office of Naval Research
  • University of California

Tags

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology