Morphological analysis of GeTe in inline phase change switches

Abstract

Crystallization and amorphization phenomena in indirectly heated phase change material-based devices were investigated. Scanning transmission electron microscopy was utilized to explore GeTe phase transition processes in the context of the unique inline phase change switch (IPCS) architecture. A monolithically integrated thin film heating element successfully converted GeTe to ON and OFF states. Device cycling prompted the formation of an active area which sustains the majority of structural changes during pulsing. A transition region on both sides of the active area consisting of polycrystalline GeTe and small nuclei (<15 nm) in an amorphous matrix was also observed. The switching mechanism, determined by variations in pulsing parameters, was shown to be predominantly growth-driven. A preliminary model for crystallization and amorphization in IPCS devices is presented.

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 03, 2015
Source ID
10.1063/1.4929419

Entities

People

  • Brian P. Wagner
  • Doyle T. Nichols
  • Evan B. Jones
  • Jitty Gu
  • Matthew R. King
  • Mike Salmon
  • Nabil El-Hinnawy
  • Pavel Borodulin
  • Robert M. Young
  • Robert S. Howell

Organizations

  • Carnegie Mellon University
  • Defense Advanced Research Projects Agency
  • Johns Hopkins University
  • North Carolina State University
  • Northrop Grumman Electronic Systems

Tags

Readers

  • Integrated Circuit Design and Technology.
  • Optical Physics and Photonics.
  • Theoretical Analysis.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene