Transport properties of ultra-thin VO2 films on (001) TiO2 grown by reactive molecular-beam epitaxy

Abstract

We report the growth of (001)-oriented VO2 films as thin as 1.5 nm with abrupt and reproducible metal-insulator transitions (MIT) without a capping layer. Limitations to the growth of thinner films with sharp MITs are discussed, including the Volmer-Weber type growth mode due to the high energy of the (001) VO2 surface. Another key limitation is interdiffusion with the (001) TiO2 substrate, which we quantify using low angle annular dark field scanning transmission electron microscopy in conjunction with electron energy loss spectroscopy. We find that controlling island coalescence on the (001) surface and minimization of cation interdiffusion by using a low growth temperature followed by a brief anneal at higher temperature are crucial for realizing ultrathin VO2 films with abrupt MIT behavior.

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 19, 2015
Source ID
10.1063/1.4932123

Entities

People

  • Darrell G. Schlom
  • David A. Muller
  • Eugene Freeman
  • Hanjong Paik
  • Jarrett A. Moyer
  • Jason Lapano
  • Joshua W. Tashman
  • Julia Mundy
  • Jürgen Schubert
  • Nikhil Shukla
  • Peter Schiffer
  • Roman Engel-herbert
  • Suman Datta
  • Timothy Spila
  • Willi Zander

Organizations

  • Cornell University
  • National Science Foundation
  • Office of Naval Research
  • Pennsylvania State University
  • University of Illinois Urbana–Champaign

Tags

Fields of Study

  • Materials science

Readers

  • Exercise and Sports Science.
  • Semiconductor Device Technology
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene