Broadband nanophotonic waveguides and resonators based on epitaxial GaN thin films
Abstract
We demonstrate broadband, low loss optical waveguiding in single crystalline GaN grown epitaxially on c-plane sapphire wafers through a buffered metal-organic chemical vapor phase deposition process. High Q optical microring resonators are realized in near infrared, infrared, and near visible regimes with intrinsic quality factors exceeding 50 000 at all the wavelengths we studied. TEM analysis of etched waveguide reveals growth and etch-induced defects. Reduction of these defects through improved material and device processing could lead to even lower optical losses and enable a wideband photonic platform based on GaN-on-sapphire material system.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Oct 05, 2015
- Source ID
- 10.1063/1.4933093
Entities
People
- Alexander W. Bruch
- Benjamin Leung
- Chi Xiong
- Hong X Tang
- Jung Han
- Menno Poot
Organizations
- Air Force Office of Scientific Research
- Army Research Office
- David and Lucile Packard Foundation
- Defense Advanced Research Projects Agency
- Yale University