Demonstration of superconducting micromachined cavities

Abstract

Superconducting enclosures will be key components of scalable quantum computing devices based on circuit quantum electrodynamics. Within a densely integrated device, they can protect qubits from noise and serve as quantum memory units. Whether constructed by machining bulk pieces of metal or microfabricating wafers, 3D enclosures are typically assembled from two or more parts. The resulting seams potentially dissipate crossing currents and limit performance. In this letter, we present measured quality factors of superconducting cavity resonators of several materials, dimensions, and seam locations. We observe that superconducting indium can be a low-loss RF conductor and form low-loss seams. Leveraging this, we create a superconducting micromachined resonator with indium that has a quality factor of two million, despite a greatly reduced mode volume. Inter-layer coupling to this type of resonator is achieved by an aperture located under a planar transmission line. The described techniques demonstrate a proof-of-principle for multilayer microwave integrated quantum circuits for scalable quantum computing.

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 09, 2015
Source ID
10.1063/1.4935541

Entities

People

  • Chen Wang
  • Luigi Frunzio
  • M. Reagor
  • Michel Devoret
  • Robert J. Schoelkopf
  • Teresa Brecht
  • Wolfgang Pfaff
  • Yuanchen Chu

Organizations

  • Alexander von Humboldt Foundation
  • Army Research Office
  • National Science Foundation
  • Yale University

Tags

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Materials Science
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.

Technology Areas

  • Quantum Computing
  • Quantum Science - Quantum Dots