Dynamic actuation of single-crystal diamond nanobeams
Abstract
We show the dielectrophoretic actuation of single-crystal diamond nanomechanical devices. Gradient radio-frequency electromagnetic forces are used to achieve actuation of both cantilever and doubly clamped beam structures, with operation frequencies ranging from a few MHz to ∼50 MHz. Frequency tuning and parametric actuation are also studied.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 14, 2015
- Source ID
- 10.1063/1.4937625
Entities
People
- Marko Loncar
- Michael J. Burek
- Ryan Kearns
- Vural Kara
- Young-ik Sohn
Organizations
- Air Force Office of Scientific Research
- Boston University
- Defense Advanced Research Projects Agency
- Harvard University
- National Science Foundation
- University of Waterloo