Thermometry of a high temperature high speed micro heater

Abstract

A high temperature high-speed tungsten micro heater was fabricated and tested for application in phase change switches to indirectly heat and transform phase change material. Time domain transmissometry was used to measure heater temperature transients for given electrical inputs. Finite element modeling results on heater temperature transients show a good consistency between experiments and simulations with 0.2% mismatch in the best case and 13.1% in the worst case. The heater described in this work can reliably reach 1664 K at a rate of 1.67 × 1010 K/s and quench to room temperature with a thermal RC time constant (time for T to fall by a factor of e) of less than 40 ns.

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 01, 2016
Source ID
10.1063/1.4942249

Entities

People

  • G. Slovin
  • J. A. Bain
  • Jeyanandh Paramesh
  • Min Xu
  • T. E. Schlesinger

Organizations

  • Carnegie Mellon University
  • Johns Hopkins University
  • Office of Naval Research

Tags

Readers

  • Calculus or Mathematical Analysis
  • Integrated Circuit Design and Technology.
  • Thermal Physics or Thermal Science.