Apparatus for generating quasi-free-space microwave-driven plasmas
Abstract
An apparatus for generating quasi-free-space microwave-driven plasmas has been designed, constructed, and tested. The plasma is driven by a multi-kW, ∼5 GHz microwave beam focused at the center of a vacuum chamber using a Koch-type metal plate lens. Sustained plasma discharges have been generated in argon at pressures ranging from 150 to 200 mTorr, at beam power levels ranging from 5 to 10 kW, and at gas flow rates of approximately 200 SCCM.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Mar 01, 2016
- Source ID
- 10.1063/1.4944865
Entities
People
- Brad W. Hoff
- David M. French
- Julie E. Lawrance
- P. David Lepell
- Remington Reid
- Sabrina S. Maestas
Organizations
- Air Force Office of Scientific Research
- Air Force Research Laboratory