Periodic surface structure bifurcation induced by ultrafast laser generated point defect diffusion in GaAs

Abstract

The formation of high spatial frequency laser induced periodic surface structures (HSFL) with period <0.3 λ in GaAs after irradiation with femtosecond laser pulses in air is studied. We have identified a point defect generation mechanism that operates in a specific range of fluences in semiconductors between the band-gap closure and ultrafast-melt thresholds that produces vacancy/interstitial pairs. Stress relaxation, via diffusing defects, forms the 350–400 nm tall and ∼90 nm wide structures through a bifurcation process of lower spatial frequency surface structures. The resulting HSFL are predominately epitaxial single crystals and retain the original GaAs stoichiometry.

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 11, 2016
Source ID
10.1063/1.4946861

Entities

People

  • Ben Torralva
  • Michael J. Abere
  • Steven M. Yalisove

Organizations

  • Air Force Office of Scientific Research
  • University of Michigan

Tags

Fields of Study

  • Materials science

Readers

  • Fluid Mechanics and Fluid Dynamics.
  • Pulsed Power and Plasma Physics.
  • Semiconductor Device Technology

Technology Areas

  • Directed Energy
  • Microelectronics