Fabrication and structural properties of AlN submicron periodic lateral polar structures and waveguides for UV-C applications
Abstract
Periodically poled AlN thin films with submicron domain widths were fabricated for nonlinear applications in the UV-VIS region. A procedure utilizing metalorganic chemical vapor deposition growth of AlN in combination with laser interference lithography was developed for making a nanoscale lateral polarity structure (LPS) with domain size down to 600 nm. The Al-polar and N-polar domains were identified by wet etching the periodic LPS in a potassium hydroxide solution and subsequent scanning electron microscopy (SEM) characterization. Fully coalesced and well-defined vertical interfaces between the adjacent domains were established by cross-sectional SEM. AlN LPSs were mechanically polished and surface roughness with a root mean square value of ∼10 nm over a 90 μm × 90 μm area was achieved. 3.8 μm wide and 650 nm thick AlN LPS waveguides were fabricated. The achieved domain sizes, surface roughness, and waveguides are suitable for second harmonic generation in the UVC spectrum.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jun 27, 2016
- Source ID
- 10.1063/1.4955033
Entities
People
- A. Bagal
- A. Franke
- A. Hoffmann
- C.-h. Chang
- Dorian Alden
- Felix Kaess
- I. Bryan
- Luis H. Hernandez-balderrama
- Marko Zgonik
- Pramod Reddy
- Ramón Collazo
- Ronny Kirste
- Seiji Mita
- Tinkara Troha
- Wei Guo
- Zlatko Sitar
Organizations
- Army Research Office
- Consejo Nacional de Humanidades, Ciencias y Tecnologías
- Division of Materials Research
- National Research Council
- North Carolina State University
- Technische Universität Berlin
- University of Ljubljana