Switchable and tunable film bulk acoustic resonator fabricated using barium strontium titanate active layer and Ta2O5/SiO2 acoustic reflector
Abstract
A solidly mounted acoustic resonator was fabricated using a Ba0.60Sr0.40TiO3 (BST) film deposited by metal organic chemical vapor deposition. The device was acoustically isolated from the substrate using a Bragg reflector consisting of three pairs of Ta2O5/SiO2 layers deposited by chemical solution deposition. Transmission electron microscopy verified that the Bragg reflector was not affected by the high temperatures and oxidizing conditions necessary to process high quality BST films. Electrical characterization of the resonator demonstrated a quality factor (Q) of 320 and an electromechanical coupling coefficient (Kt2) of 7.0% at 11 V.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Aug 01, 2016
- Source ID
- 10.1063/1.4960361
Entities
People
- A. R. Mansour
- G. S. Tompa
- H. Khassaf
- He Yu
- M. Aindow
- N. M. Sbrockey
- S. P. Alpay
- T. S. Kalkur
Organizations
- Army Research Office
- Colorado State University
- University of Connecticut