Characterization of encapsulated quantum dots via electron channeling contrast imaging

Abstract

A method for characterization of encapsulated epitaxial quantum dots (QD) in plan-view geometry using electron channeling contrast imaging (ECCI) is presented. The efficacy of the method, which requires minimal sample preparation, is demonstrated with proof-of-concept data from encapsulated (sub-surface) epitaxial InAs QDs within a GaAs matrix. Imaging of the QDs under multiple diffraction conditions is presented, establishing that ECCI can provide effectively identical visualization capabilities as conventional two-beam transmission electron microscopy. This method facilitates rapid, non-destructive characterization of sub-surface QDs giving immediate access to valuable nanostructural information.

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 08, 2016
Source ID
10.1063/1.4960643

Entities

People

  • David W McComb
  • Julia I. Deitz
  • Marc Degraef
  • Santino D. Carnevale
  • Tyler J. Grassman

Organizations

  • Air Force Research Laboratory
  • Carnegie Mellon University
  • Ohio State University

Tags

Fields of Study

  • Physics

Readers

  • Image Processing and Computer Vision.
  • Nanocomposite Materials Science
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.

Technology Areas

  • Microelectronics
  • Quantum Computing