Suppression of surface-originated gate lag by a dual-channel AlN/GaN high electron mobility transistor architecture

Abstract

A dual-channel AlN/GaN high electron mobility transistor (HEMT) architecture is demonstrated that leverages ultra-thin epitaxial layers to suppress surface-related gate lag. Two high-density two-dimensional electron gas (2DEG) channels are utilized in an AlN/GaN/AlN/GaN heterostructure wherein the top 2DEG serves as a quasi-equipotential that screens potential fluctuations resulting from distributed surface and interface states. The bottom channel serves as the transistor's modulated channel. Dual-channel AlN/GaN heterostructures were grown by molecular beam epitaxy on free-standing hydride vapor phase epitaxy GaN substrates. HEMTs fabricated with 300 nm long recessed gates demonstrated a gate lag ratio (GLR) of 0.88 with no degradation in drain current after bias stressed in subthreshold. These structures additionally achieved small signal metrics ft/fmax of 27/46 GHz. These performance results are contrasted with the non-recessed gate dual-channel HEMT with a GLR of 0.74 and 82 mA/mm current collapse with ft/fmax of 48/60 GHz.

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 08, 2016
Source ID
10.1063/1.4961009

Entities

People

  • D. Scott Katzer
  • David A. Deen
  • David F. Storm
  • David J. Meyer
  • R. Bass

Organizations

  • Office of Naval Research Global
  • United States Naval Research Laboratory

Tags

Fields of Study

  • Materials science

Readers

  • Computer Science/Computer Engineering/Data Science/Digital Signal Processing.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics