(Ba,Sr)TiO3 tunable capacitors with RF commutation quality factors exceeding 6000

Abstract

The fabrication, measurement, and modeling of radio-frequency (RF), tunable interdigital capacitors (IDCs) are described. High quality factors of 200 in the S/L-bands combined with a 47% tunability are achieved by utilizing epitaxial (Ba,Sr)TiO3 films grown by hybrid molecular beam epitaxy on LaAlO3 substrates. The fabricated devices consisted of one-port and two-port IDCs embedded in ground-signal-ground, coplanar waveguide transmission lines to enable RF probing. Wideband RF scattering parameters under bias were measured from 100 MHz to 40 GHz. A commutation quality factor averaging 6000 across the L band is achieved. These are the highest reported values in this band.

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 12, 2016
Source ID
10.1063/1.4961626

Entities

People

  • Cedric J. G. Meyers
  • Christopher R. Freeze
  • Robert A. York
  • Susanne Stemmer

Organizations

  • Army Research Office
  • National Science Foundation
  • Northrop Grumman
  • University of California

Tags

Readers

  • Microwave Engineering.
  • Thin Film Deposition Science.