Infrared vertically-illuminated photodiode for chip alignment feedback
Abstract
We report on vertically-illuminated photodiodes fabricated in the GlobalFoundries 45nm 12SOI node and on a packaging concept for optically-interconnected chips. The photodiodes are responsive at 1180 nm –a wavelength currently used in chip-to-chip communications. They have further a wide field-of-view which enables chip-to-board positional feedback in chip-board assemblies. Monolithic integration enables on-chip processing of the positional data.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Aug 01, 2016
- Source ID
- 10.1063/1.4961949
Entities
People
- Luca Alloatti
- R. J. Ram
Organizations
- Defense Advanced Research Projects Agency
- Massachusetts Institute of Technology