Strained GaN quantum-well FETs on single crystal bulk AlN substrates

Abstract

We report the first realization of molecular beam epitaxy (MBE) grown strained GaN quantum well field-effect transistors on single-crystal bulk AlN substrates. The fabricated double heterostructure FETs exhibit a two-dimensional electron gas (2DEG) density in the excess of 2 × 1013/cm2. The ohmic contacts to the 2DEG channel were formed by the n+ GaN MBE regrowth process, with a contact resistance of 0.13 Ω · mm. The Raman spectroscopy using the quantum well as an optical marker reveals the strain in the quantum well and strain relaxation in the regrown GaN contacts. A 65-nm-long rectangular-gate device showed a record high DC drain current drive of 2.0 A/mm and peak extrinsic transconductance of 250 mS/mm. Small-signal RF performance of the device achieved the current gain cutoff frequency fT∼120 GHz. The DC and RF performances demonstrate that bulk AlN substrates offer an attractive alternative platform for strained quantum well nitride transistors for the future high-voltage and high-power microwave applications.

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 06, 2017
Source ID
10.1063/1.4975702

Entities

People

  • Bo Song
  • Debdeep Jena
  • Guowang Li
  • Huili Grace Xing
  • Jai Verma
  • Kazuki Nomoto
  • Meng Qi
  • Mingda Zhu
  • Pei Zhao
  • Satyaki Ganguly
  • Xiaodong Yan

Organizations

  • Cornell University
  • National Science Foundation
  • Office of Naval Research
  • University of Notre Dame

Tags

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology

Technology Areas

  • Directed Energy
  • Microelectronics
  • Quantum Computing